Low-temperature Ge and GeSn Chemical Vapor Deposition using Ge2H6

Federica Gencarelli(IMEC), Marc Heyns(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Laurent Souriau(IMEC), Olivier Richard(IMEC), Benjamin Vincent(IMEC), Roger Loo(IMEC)
Thin Solid Films
October 31, 2011
10.1016/j.tsf.2011.10.119
Cited by 81

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