Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part I: Mechanical Design and CharacterizationTheodore Reck, N. Scott Barker, Lihan Chen et al.|IEEE Transactions on Terahertz Science and Technology|2011Cited by 85
Micromachined Probes for Submillimeter-Wave On-Wafer Measurements—Part II: RF Design and CharacterizationTheodore Reck, N. Scott Barker, Lihan Chen et al.|IEEE Transactions on Terahertz Science and Technology|2011Cited by 58
Terahertz Micromachined On-Wafer Probes: Repeatability and ReliabilityLihan Chen, N. Scott Barker, Chunhu Zhang et al.|IEEE Transactions on Microwave Theory and Techniques|2012Cited by 39
Micromachined on-wafer probesTheodore Reck, Robert M. Weikle, Lihan Chen et al.|2010 IEEE MTT-S International Microwave Symposium|2010Cited by 25
Improved Micromachined Terahertz On-Wafer Probe Using Integrated Strain SensorQiang Yu, N. Scott Barker, Robert M. Weikle et al.|IEEE Transactions on Microwave Theory and Techniques|2013Cited by 23