Improved Micromachined Terahertz On-Wafer Probe Using Integrated Strain Sensor
Qiang Yu(Fudan University), N. Scott Barker(University of Virginia), Robert M. Weikle(Microprobes (United States)), Arthur W. Lichtenberger(University of Virginia), Matthew F. Bauwens(University of Virginia), Chunhu Zhang(University of Virginia)
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