Micromachined on-wafer probes
Theodore Reck(Virginia Diodes (United States)), Robert M. Weikle(Microprobes (United States)), Arthur W. Lichtenberger(University of Virginia), Lihan Chen(University of Virginia), N. Scott Barker(University of Virginia), Christopher Groppi, Chunhu Zhang(University of Virginia), Haiyong Xu(University of Virginia), Alex Arsenovic(University of Virginia)
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