R.P. Webb

University of Surrey

ORCID: 0000-0002-9557-5207

318 papers and 5k citations.

PubIndex Score97Top 3%How it's scored

318Publications

5kTotal Citations

First senior author: 1970

Top publicationsby citations

Antimony for n-type metal oxide semiconductor ultrashallow junctions in strained Si: A superior dopant to arsenic?

Nick S. Bennett, P.J. McNally, L. O’Reilly et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|2008

Cited by 23

Vacancy Engineering – An Ultra-Low Thermal Budget Method for High-Concentration 'Diffusionless' Implantation Doping

N. E. B. Cowern, A. Pakfar, Andrew J. Smith et al.|Materials science forum|2008

Cited by 3

Interaction of the end of range defect band with the upper buried oxide interface for B and BF2 implants in Si and silicon on insulator with and without preamorphizing implant

M. Kah, K.J. Kirkby, R.P. Webb et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|2008

Cited by 1

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