Vacancy Engineering – An Ultra-Low Thermal Budget Method for High-Concentration 'Diffusionless' Implantation Doping
N. E. B. Cowern(University of Surrey), A. Pakfar(STMicroelectronics (Switzerland)), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), B. Colombeau(University of Surrey), Silke Paul, B.J. Sealy(University of Surrey), Wilfried Lerch, R.P. Webb(University of Surrey)
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