Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor moleculesJeong‐Min Lee, Woo‐Hee Kim, Il Woo Kim et al.|Applied Surface Science|2020Cited by 37
The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and <i>ab initio</i> molecular dynamics studyHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|RSC Advances|2020Cited by 23
First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and ClHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|Scientific Reports|2019Cited by 18
Effects of nitrogen doping in amorphous carbon layers on the diffusion of fluorine atoms: A first-principles studyHwanyeol Park, Gun‐Do Lee, Se Jun Park et al.|Journal of Applied Physics|2019Cited by 16
Overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles studyHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|RSC Advances|2018Cited by 14