Effects of nitrogen doping in amorphous carbon layers on the diffusion of fluorine atoms: A first-principles study

Hwanyeol Park(Soonchunhyang University), Gun‐Do Lee(University of Seoul), Euijoon Yoon(Seoul National University), Ho Jun Kim(Soonchunhyang University), Sung‐Woo Lee(University of Seoul), Daekwang Woo(Samsung (South Korea)), Se Jun Park(Samsung (South Korea)), Jong Myeong Lee(Hanyang University)
Journal of Applied Physics
April 15, 2019
Cited by 16


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