Effects of nitrogen doping in amorphous carbon layers on the diffusion of fluorine atoms: A first-principles study

Hwanyeol Park(Hanyang University), Gun‐Do Lee(Seoul National University), Euijoon Yoon(Seoul National University), Ho Jun Kim(Hanyang University), Sung‐Woo Lee(Chonnam National University Hwasun Hospital), Daekwang Woo(Samsung (South Korea)), Se Jun Park(Samsung (South Korea)), Jong Myeong Lee(Hanyang University)
Journal of Applied Physics
April 15, 2019
Cited by 16


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