Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules
Jeong‐Min Lee(Hanyang University), Woo‐Hee Kim(Hanyang University), Jong Myeong Lee(Hanyang University), Jinseon Lee(Samsung (South Korea)), Hwanyeol Park(Soonchunhyang University), Tae Joo Park(Hanyang University), Ji Won Han(Hanyang University), Se-Jin Kyung(Samsung (South Korea)), Il Woo Kim(Samsung (South Korea))
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