Enhanced selectivity of atomic layer deposited Ru thin films through the discrete feeding of aminosilane inhibitor molecules

Jeong‐Min Lee(Hanyang University), Woo‐Hee Kim(Hanyang University), Jong Myeong Lee(Hanyang University), Jinseon Lee(Samsung (South Korea)), Hwanyeol Park(Soonchunhyang University), Tae Joo Park(Hanyang University), Ji Won Han(Hanyang University), Se-Jin Kyung(Samsung (South Korea)), Il Woo Kim(Samsung (South Korea))
Applied Surface Science
October 27, 2020
Cited by 37


Related Papers