The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and <i>ab initio</i> molecular dynamics studyHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|RSC Advances|2020Cited by 23
First principles investigation on energetics, structure, and mechanical properties of amorphous carbon films doped with B, N, and ClHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|Scientific Reports|2019Cited by 18
Effects of nitrogen doping in amorphous carbon layers on the diffusion of fluorine atoms: A first-principles studyHwanyeol Park, Gun‐Do Lee, Daekwang Woo et al.|Journal of Applied Physics|2019Cited by 16
Overall reaction mechanism for a full atomic layer deposition cycle of W films on TiN surfaces: first-principles studyHwanyeol Park, Gun‐Do Lee, Sung‐Woo Lee et al.|RSC Advances|2018Cited by 14
Effects of H<sub>2</sub> and N<sub>2</sub> treatment for B<sub>2</sub>H<sub>6</sub> dosing process on TiN surfaces during atomic layer deposition: an <i>ab initio</i> studyHwanyeol Park, Gun‐Do Lee, Kangsoo Kim et al.|RSC Advances|2018Cited by 5