Investigation and optimization of the magnetic field configuration in high-power impulse magnetron sputteringHe Yu, D. N. Ruzic, Tae S. Cho et al.|Plasma Sources Science and Technology|2013Cited by 28
Downstream plasma transport and metal ionization in a high-powered pulsed-plasma magnetronLiang Meng, D. N. Ruzic, He Yu et al.|Journal of Applied Physics|2014Cited by 25
Modeling the ion beam target interaction to reduce defects generated by ion beam depositionThomas Cardinal, D. N. Ruzic, D. Andruczyk et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|2012Cited by 4
Origin of EUV mask blank defects from ion beam depositionHe Yu, Yong Jiang, D. Andruczyk et al.|Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE|2012Cited by 0
Origin of defects on targets used to make extreme ultraviolet mask blanksHe Yu, Patrick A. Kearney, D. N. Ruzic et al.|Journal of Vacuum Science & Technology A Vacuum Surfaces and Films|2013Cited by 0