Modeling the ion beam target interaction to reduce defects generated by ion beam deposition

Thomas Cardinal, D. N. Ruzic(University of Illinois Urbana-Champaign), Patrick A. Kearney, D. Andruczyk(University of Illinois Urbana-Champaign), He Yu(University of Electronic Science and Technology of China), Vibhu Jindal
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
March 23, 2012
Cited by 4


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