Downstream plasma transport and metal ionization in a high-powered pulsed-plasma magnetron
Liang Meng(University of Illinois Urbana-Champaign), D. N. Ruzic(University of Illinois Urbana-Champaign), Matthew Szott(University of Illinois Urbana-Champaign), J. McLain(University of Illinois Urbana-Champaign), He Yu(University of Electronic Science and Technology of China)
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