Use of the ultraviolet absorption spectrum of CF2 to determine the spatially resolved absolute CF2 density, rotational temperature, and vibrational distribution in a plasma etching reactorNicolas Bulcourt, John M. Dyke, Jean‐Paul Booth et al.|The Journal of Chemical Physics|2004Cited by 38
CF A 2Σ+–X 2Π and B 2Δ–X 2Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X 2Π concentrations, and gas temperaturesJorge Luque, Jean‐Paul Booth, Eric A. Hudson|The Journal of Chemical Physics|2002Cited by 30
Broadband absorption and <i>ab initio</i> results on the CF C 2Σ+–X 2Π systemJorge Luque, Ioannis D. Petsalakis, Eric A. Hudson et al.|The Journal of Chemical Physics|2003Cited by 10
UV absorption spectrum of the radical CF 2 in an Ar/C_4F_8/O 2 dual frequency capacitive dischargeNicolas Bulcourt, Foo‐Tim Chau, John M. Dyke et al.|APS Annual Gaseous Electronics Meeting Abstracts|2003Cited by 0