Use of the ultraviolet absorption spectrum of CF2 to determine the spatially resolved absolute CF2 density, rotational temperature, and vibrational distribution in a plasma etching reactorNicolas Bulcourt, John M. Dyke, Daniel Kam‐Wah Mok et al.|The Journal of Chemical Physics|2004Cited by 38
UV absorption spectrum of the radical CF 2 in an Ar/C_4F_8/O 2 dual frequency capacitive dischargeNicolas Bulcourt, Foo‐Tim Chau, Jean‐Paul Booth et al.|APS Annual Gaseous Electronics Meeting Abstracts|2003Cited by 0