CF A 2Σ+–X 2Π and B 2Δ–X 2Π study by broadband absorption spectroscopy in a plasma etch reactor: Determination of transition probabilities, CF X 2Π concentrations, and gas temperatures

Jorge Luque(Lam Research (United States)), Jean‐Paul Booth(Centre National de la Recherche Scientifique), Eric A. Hudson(Freie Universität Berlin)
The Journal of Chemical Physics
December 28, 2002
Cited by 30


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