Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> from WF<sub>6</sub>, H<sub>2</sub> Plasma, and H<sub>2</sub>SBenjamin Groven, Annelies Delabie, Sven Van Elshocht et al.|Chemistry of Materials|2017Cited by 81
Low temperature deposition of 2D WS <sub>2</sub> layers from WF <sub>6</sub> and H <sub>2</sub> S precursors: impact of reducing agentsAnnelies Delabie, Aaron Thean, Matty Caymax et al.|Chemical Communications|2015Cited by 80
Two-Dimensional Crystal Grain Size Tuning in WS<sub>2</sub> Atomic Layer Deposition: An Insight in the Nucleation MechanismBenjamin Groven, Annelies Delabie, Ankit Nalin Mehta et al.|Chemistry of Materials|2018Cited by 78
Nucleation mechanism during WS2 plasma enhanced atomic layer deposition on amorphous Al2O3 and sapphire substratesBenjamin Groven, Annelies Delabie, Iuliana Radu et al.|Journal of Vacuum Science & Technology A Vacuum Surfaces and Films|2017Cited by 42