Two-Dimensional Crystal Grain Size Tuning in WS<sub>2</sub> Atomic Layer Deposition: An Insight in the Nucleation Mechanism
Benjamin Groven(IMEC), Annelies Delabie(IMEC), Ben Schoenaers(KU Leuven), Johan Meersschaut(IMEC), Patrick Verdonck(Material (Belgium)), A. Stesmans(KU Leuven), Thomas Nuytten(IMEC), Quentin Smets(IMEC), Iuliana Radu(IMEC), Thierry Conard(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Marc Heyns(IMEC), H. Bender(IMEC), Ankit Nalin Mehta(IMEC), Valeri Afanas’ev(IMEC), T. Schram(IMEC)
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