Plasma-Enhanced Atomic Layer Deposition of Two-Dimensional WS<sub>2</sub> from WF<sub>6</sub>, H<sub>2</sub> Plasma, and H<sub>2</sub>S
Benjamin Groven(IMEC), Annelies Delabie(IMEC), Patrick Verdonck(Material (Belgium)), Thomas Nuytten(IMEC), Iuliana Radu(IMEC), Thierry Conard(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), Marc Heyns(IMEC), Stefan De Gendt(Imec the Netherlands), H. Bender(IMEC), Markus Heyne(IMEC), Ankit Nalin Mehta(IMEC), Sven Van Elshocht(Columbia University), Johan Meersschaut(IMEC)
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