New Materials for Memory Applications by Atomic Layer Deposition
A. Illiberi(ASM International (Belgium)), Michael Givens(ASM International (Belgium)), Vivek Mootheri(ASM International (Belgium)), L. Lukose(IMEC), M. D. Surman, M. Popovici(IMEC), Ranjith Ramachandra, Alessandra Leonhardt(ASM International (Finland))
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