Understanding ferroelectric Al:HfO2 thin films with Si-based electrodes for 3D applications

Karine Florent(IMEC), Jan Van Houdt(IMEC), Luca Piazza(IMEC), M. Popovici(IMEC), Simone Lavizzari(IMEC), Umberto Celano(Arizona State University), G. Groeseneken(IMEC)
Journal of Applied Physics
May 26, 2017
Cited by 80


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