Understanding ferroelectric Al:HfO2 thin films with Si-based electrodes for 3D applications
Karine Florent(IMEC), Jan Van Houdt(IMEC), Luca Piazza(IMEC), M. Popovici(IMEC), Simone Lavizzari(IMEC), Umberto Celano(Arizona State University), G. Groeseneken(IMEC)
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