Single-Crystal Islands (SCI) for Monolithic 3-D and Back-End-of-Line FinFET Circuits

Yuwei Liu(National Yang Ming Chiao Tung University), Chenming Hu(University of California, Berkeley), Shu-Jui Chang(National Yang Ming Chiao Tung University), Ping-Yi Hsieh(Taiwan Semiconductor Manufacturing Company (Taiwan)), Jia‐Min Shieh(Taiwan Semiconductor Manufacturing Company (Taiwan)), Kuan‐Neng Chen(National Yang Ming Chiao Tung University), Hao-Tung Chung(National Yang Ming Chiao Tung University), Po-Tsang Huang(National Yang Ming Chiao Tung University), Jui-Han Liu(National Yang Ming Chiao Tung University), Chang‐Hong Shen(Taiwan Semiconductor Manufacturing Company (Taiwan)), Chih-Chao Yang(Taiwan Semiconductor Manufacturing Company (Taiwan)), Hanwen Hu(North Sichuan Medical University)
IEEE Transactions on Electron Devices
August 9, 2021
Cited by 8


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