Electrical Characteristics and Reliability of Wafer-on-Wafer (WOW) Bumpless Through-Silicon Via

Yi-Chieh Tsai(National Yang Ming Chiao Tung University), Kuan‐Neng Chen(National Yang Ming Chiao Tung University), Jui-Han Liu(National Yang Ming Chiao Tung University), Hanwen Hu(North Sichuan Medical University), Chia-Hsuan Lee(National Yang Ming Chiao Tung University), Young Seok Kim(Yonsei University), Hsin-Chi Chang(National Yang Ming Chiao Tung University), Hiroyuki Ito(Innovative Research (United States)), Takayuki Ohba(Tokyo Institute of Technology)
IEEE Transactions on Electron Devices
May 31, 2021
Cited by 19


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