Vertical Sandwich Gate-All-Around Field-Effect Transistors With Self-Aligned High-k Metal Gates and Small Effective-Gate-Length Variation

Xiaogen Yin(Chinese Academy of Sciences), Tianchun Ye(University of Chinese Academy of Sciences), Zihao Xuan(University of Science and Technology of China), Tao Yang(University of Science and Technology of China), Jianfeng Gao(Chinese Academy of Sciences), Xiaobin He(Chinese Academy of Sciences), W. W. Wang(University of Science and Technology of China), Huaxiang Yin(Chinese Academy of Sciences), Qingzhu Zhang(Hebei University of Technology), Zhenhua Wu(University of Chinese Academy of Sciences), Henry H. Radamson(Chinese Academy of Sciences), Hong Yang(Chinese Academy of Sciences), Weixing Huang(Chinese Academy of Sciences), Zhenzhen Kong(First Affiliated Hospital of Guangzhou Medical University), Yongzheng Zhang(Chinese Academy of Sciences), Guoxiang Wang(Chinese Academy of Sciences), Jing Han(Chinese Academy of Sciences), S. S.(Chinese Academy of Sciences), Yongkui Zhang(Chinese Academy of Sciences), Jianwen Zhao(Xinjiang Medical University), Y. B. Zhang(Chinese Academy of Sciences), Anyan Du(Chinese Academy of Sciences), Yangyang Li(Chinese Academy of Sciences), Chen Li(Chinese Academy of Sciences), Jun Luo(Chinese Academy of Sciences), Xueli Ma(Chinese Academy of Sciences), Yang Qu(Chinese Academy of Sciences), Qinghai Zhang(Guiyang Medical University), Lili Li(Chinese Academy of Sciences), Chao Zhao(Chinese Academy of Sciences), Yihong Lu(University of Science and Technology of China), Huilong Zhu(University of Chinese Academy of Sciences), L. H. Zhao(University of Science and Technology of China), J. F. Li(Chinese Academy of Sciences), Jinjuan Xiang(University of Chinese Academy of Sciences), N. Zhou(Tianjin Medical University General Hospital), X. Z. Ai(Wuhan University of Technology), J. J. Li(Chinese Academy of Sciences), G. B. Bai(University of Science and Technology of China), Ruixia Chen(Chinese Academy of Sciences), Kunpeng Jia(Chinese Academy of Sciences), Lu Xie(Chinese Academy of Sciences), Shujuan Mao(Chinese Academy of Sciences)
IEEE Electron Device Letters
November 21, 2019
Cited by 78


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