Mesoscopic physical removal of material using sliding nano-diamond contacts

Umberto Celano(Arizona State University), Wilfried Vandervorst(IMEC), Feng‐Chun Hsia(IMEC), Danielle Vanhaeren(IMEC), Thomas Hantschel(Palo Alto Research Center), Josephus G. Buijnsters(Delft University of Technology), Kristof Paredis(IMEC), Torbjörn E. M. Nordling(National Cheng Kung University)
Scientific Reports
February 8, 2018
Cited by 42


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