Metrology for the next generation of semiconductor devices
Ndubuisi G. Orji(National Institute of Standards and Technology), András Vládar(National Institute of Standards and Technology), Umberto Celano(Arizona State University), B Bunday(University of Malta), Yaw S. Obeng(Unknown), Mustafa Badaroglu, Brian M. Barnes(University of Alaska Fairbanks), Mark Neisser(Beijing Microelectronics Technology Institute), R. Joseph Kline(National Institute of Standards and Technology), C. Beitia(Institut polytechnique de Grenoble)
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