Metrology for the next generation of semiconductor devices

Ndubuisi G. Orji(National Institute of Standards and Technology), András Vládar(National Institute of Standards and Technology), Umberto Celano(Arizona State University), B Bunday(University of Malta), Yaw S. Obeng(National Institute of Standards and Technology), Mustafa Badaroglu, Brian M. Barnes(National Institute of Standards and Technology), Mark Neisser(Beijing Microelectronics Technology Institute), R. Joseph Kline(Lawrence Berkeley National Laboratory), C. Beitia(Institut polytechnique de Grenoble)
Nature Electronics
October 8, 2018
Cited by 479


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