BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
T. Schram(IMEC), Iuliana Radu(IMEC), Daniele Chiappe(IMEC), Annelies Delabie(IMEC), Şafak Sayan(IMEC), Cedric Huyghebaert(IMEC), Inge Asselberghs(IMEC), S. Brus(University of Liège), Quentin Smets(IMEC), K. Devriendt(IMEC), Matty Caymax(IMEC), Marcel Lux, A. Juncker(IMEC), E. Kunnen(IMEC), Markus Heyne(IMEC), B. Graven(IMEC), Dennis Lin(IMEC), Arame Thiam(IMEC)
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