WS<inf>2</inf> transistors on 300 mm wafers with BEOL compatibility
T. Schram(IMEC), Iuliana Radu(IMEC), Daniele Chiappe(IMEC), Annelies Delabie(IMEC), Şafak Sayan(IMEC), Cedric Huyghebaert(IMEC), Inge Asselberghs(IMEC), S. Brus(University of Liège), Quentin Smets(IMEC), Benjamin Groven(IMEC), K. Devriendt(IMEC), Matty Caymax(IMEC), Marcel Lux, A. Juncker(IMEC), E. Kunnen(IMEC), Markus Heyne(IMEC), Dennis Lin(IMEC), Arame Thiam(IMEC)
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