High Quality Ge Virtual Substrates on Si Wafers with Standard STI Patterning
Roger Loo(IMEC), Matty Caymax(IMEC), Guy Brammertz(IMEC), Jason Lin(Apellis Pharmaceuticals (United States)), G. Wang(IMEC), Shotaro Takeuchi(Fukui Prefectural University), Laurent Souriau(IMEC)
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