Metal gate work function adjustment for future CMOS technology

Qiang Lü(University of California, Berkeley), Chenming Hu(National Yang Ming Chiao Tung University), Tsu‐Jae King(University of California, Berkeley), P. Ranade(University of California, Berkeley), R. Lin(University of California, Berkeley)
Unknown
November 13, 2002
10.1109/vlsit.2001.934939
Cited by 41

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