H[sub 2]O- and O[sub 3]-Based Atomic Layer Deposition of High-κ Dielectric Films on GeO[sub 2] Passivation Layers
Annelies Delabie(IMEC), Marc Meuris(IMEC), Thierry Conard(IMEC), Matty Caymax(IMEC), Marc Heyns(IMEC), Alexis Franquet(IMEC), Florence Bellenger(IMEC), Sven Van Elshocht(Columbia University), A. Alian(IMEC), Sonja Sioncke(IMEC)
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