Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric films
An Hardy(IMEC), J. Mullens(Hasselt University), T. Witters(IMEC), Thierry Conard(IMEC), Matty Caymax(IMEC), Marc Heyns(IMEC), Olivier Douhéret(IMEC), Christoph Adelmann(Imec the Netherlands), Stefan De Gendt(Imec the Netherlands), H. Bender(IMEC), Sven Van Elshocht(Columbia University), Jan D’Haen(Imec the Netherlands), Marlies K. Van Bael(IMEC), M. D’Olieslaeger(IMEC), Olivier Richard(IMEC)
Journal of materials research/Pratt's guide to venture capital sources
November 28, 2007
Cited by 22
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