Impact of Process Optimizations on the Electrical Performance of High-k Layers Deposited by Aqueous Chemical Solution DepositionSven Van Elshocht, Stefan De Gendt, J. Mullens et al.|Journal of The Electrochemical Society|2008Cited by 25
Aqueous solution–gel preparation of ultrathin ZrO2 films for gate dielectric applicationAn Hardy, J. Mullens, Sven Van Elshocht et al.|Thin Solid Films|2008Cited by 23
Aqueous chemical solution deposition of ultrathin lanthanide oxide dielectric filmsAn Hardy, J. Mullens, Sven Van Elshocht et al.|Journal of materials research/Pratt's guide to venture capital sources|2007Cited by 22
Aqueous Chemical Solution DepositionSven Van Elshocht, Marc Heyns, An Hardy et al.|Electrochemical and Solid-State Letters|2007Cited by 17