Using Ellipsometry for Assessment of TiN Surface Roughness after Plasma Etch

Denis Shamiryan(IMEC), Werner Boullart(IMEC), Mikhaı̈l R. Baklanov(MIREA - Russian Technological University), Dries Dictus(IMEC), Vasile Paraschiv(IMEC), S. Beckx(Imec the Netherlands)
Journal of The Electrochemical Society
December 26, 2007
10.1149/1.2817895
Cited by 2

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