Growth of high quality InP layers in STI trenches on miscut Si (001) substrates
G. Wang(IMEC), Matty Caymax(IMEC), J. Dekoster(IMEC), Maarten Leys(IMEC), Guy Brammertz(IMEC), M. Heyns(IMEC), H. Bender(IMEC), Ngoc Duy Nguyen(University of Liège), Olivier Richard(IMEC), Marc Meuris(IMEC), Roger Loo(IMEC)
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