Influence of TaN Gate Electrode Microstructure on Its Dry Etch Properties

Denis Shamiryan(IMEC), Werner Boullart(IMEC), Vasile Paraschiv(IMEC), S. Beckx(Imec the Netherlands), Zsolt Tökei(IMEC)
Electrochemical and Solid-State Letters
January 1, 2006
10.1149/1.2208010
Cited by 3

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