Alignment of a multilayer-coated imaging system using extreme ultraviolet Foucault and Ronchi interferometric testing
Avijit K. Ray-Chaudhuri(Sandia National Laboratories California), S. J. Spector(Alcatel Lucent (Germany)), F. Cerrina(University of Wisconsin–Madison), Zhuopeng Tan(AT&T (United States)), D. M. Tennant(University of Tennessee at Knoxville), J. E. Bjorkholm(AT&T (United States)), W. Ng(University of Wisconsin–Madison)
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
November 1, 1995
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