S. J. Spector

2 papers and 145 citations.

2Publications

145Total Citations

Top publicationsby citations

Process optimization for production of sub-20 nm soft x-ray zone plates

S. J. Spector, D. M. Tennant, Chris Jacobsen|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1997

Cited by 125

Alignment of a multilayer-coated imaging system using extreme ultraviolet Foucault and Ronchi interferometric testing

Avijit K. Ray-Chaudhuri, S. J. Spector, W. Ng et al.|Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena|1995

Cited by 20

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