A TSV last integration approach with wafer level pre-patterned adhesive bonding

Yunhui Zhu(Peking University), Yufeng Jin(Peking University Shenzhen Hospital), Xiaoxia Zhong(Shanghai Jiao Tong University), Yuan Bian(Peking University), Shenglin Ma(Xiamen University), Qinghu Cui(Peking University Shenzhen Hospital), Min Miao(Information Technology Institute), Xin Sun(Peking University), Jing Chen(Shanghai Jiao Tong University)
2012 4th Electronic System-Integration Technology Conference
September 1, 2012
Cited by 0


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