Successful Selective Epitaxial Si[sub 1−x]Ge[sub x] Deposition Process for HBT-BiCMOS and High Mobility Heterojunction pMOS Applications
Roger Loo(IMEC), K. De Meyer(IMEC), Nadine Collaert(IMEC), Wilfried Vandervorst(Imec the Netherlands), Matty Caymax(IMEC), I. Peytier(IMEC), Peter Verheyen(IMEC), Stefaan Decoutere(IMEC)
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