Improved thermal stability of Ni-silicides on Si:C epitaxial layers
Vladimir Machkaoutsan(ASM International (Belgium)), E.H.A. Granneman(ASM International), A. Lauwers, S. Jakschik(IMEC), Matty Caymax(IMEC), D. Theodore(Motorola (United States)), Matthias Bauer(Paderborn University), K. Vanormelingen(KU Leuven), Peter Verheyen(IMEC), S. Mertens(IMEC), P. Absil(IMEC), K. Verheyden(ASM International (Belgium)), Shawn Thomas(ASM International), Roger Loo(IMEC)
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