Enhanced Antimony Activation for Ultra-Shallow Junctions in Strained Silicon

Nick S. Bennett(University of Surrey), B.J. Sealy(University of Surrey), L. O’Reilly(Dublin City University), Andrew J. Smith(Intel (United States)), R. Gwilliam(University of Surrey), C.S. Beer(University of Warwick), N. E. B. Cowern(University of Surrey), B. Colombeau(University of Surrey), P.J. McNally(Dublin City University), R. L. Harper(Cardiff University), Gabriela Dilliway(University of Surrey)
MRS Proceedings
January 1, 2006
Cited by 3


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