On the Application of a Thin Ozone Based Wet Chemical Oxide as an Interface for ALD High-k Deposition
Bart Onsia, Chris Vinckier(KU Leuven), Wu‐ting Tsai, Thierry Conard(IMEC), Matty Caymax(IMEC), Annelies Delabie(IMEC), Marc Heyns(IMEC), Stefan De Gendt(Imec the Netherlands), Shide Lin(Guangzhou University of Chinese Medicine), Paul Mertens(IMEC), Christiane Gottschalk, M. Green, Florimond De Smedt(Vrije Universiteit Brussel)
Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena
April 1, 2005
Cited by 48
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