Understanding effect of additives in copper electroplating filling for through silicon via

Min Miao(Information Technology Institute), Yufeng Jin(Peking University), Xiaoxia Zhong(Shanghai Jiao Tong University), Yuan Bian(Peking University), Shenglin Ma(Xiamen University), Yunhui Zhu(Peking University), Qinghu Cui(Peking University Shenzhen Hospital), Runiu Fang(Peking University), Xin Sun(Peking University), Jing Chen(Shanghai Jiao Tong University)
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October 1, 2012
Cited by 2


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