Junction Stability of B Doped Layers in SOI Formed with Optimized Vacancy Engineering Implants

Andrew J. Smith(Intel (United States)), Mario Barozzi(Fondazione Bruno Kessler), B.J. Sealy(University of Surrey), R. Gwilliam(University of Surrey), M. Bersani(Fondazione Bruno Kessler), S. Gennaro(University of Surrey), E. J. H. Collart(University of Surrey), N. E. B. Cowern(University of Surrey), B. Colombeau, D. Giubertoni(Fondazione Bruno Kessler)
AIP conference proceedings
January 1, 2006
Cited by 3


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