Structural and mechanical properties of polycrystalline silicon germanium for micromachining applicationsSherif Sedky, R. Mertens, S. Loreti et al.|Journal of Microelectromechanical Systems|1998Cited by 68
Characterization of bolometers based on polycrystalline silicon germanium alloysSherif Sedky, R. Mertens, Paolo Fiorini et al.|IEEE Electron Device Letters|1998Cited by 36
Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranesK. Verhaegen, Robert Mertens, Kris Baert et al.|Sensors and Materials|1999Cited by 2
The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranesK. Verhaegen, Robert Mertens, L. Hermans et al.|Unknown|2002Cited by 0