The use of liquid rubber in micromachining focussed on flexible large area biocompatible membranes

K. Verhaegen, Robert Mertens(Humboldt-Universität zu Berlin), Willy Sansen(Institute of Electrical and Electronics Engineers), L. Hermans(IMEC), Kris Baert(Ghent University)
Unknown
November 22, 2002
Cited by 0


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