Structural and mechanical properties of polycrystalline silicon germanium for micromachining applications

Sherif Sedky(IMEC), R. Mertens(IMEC), Paolo Fiorini(University of Verona), S. Loreti(National Agency for New Technologies, Energy and Sustainable Economic Development), Kris Baert(Ghent University), L. Hermans(IMEC), Matty Caymax(IMEC)
Journal of Microelectromechanical Systems
January 1, 1998
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