Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranes
K. Verhaegen, Robert Mertens(Humboldt-Universität zu Berlin), Robert Puers(KU Leuven), Willy Sansen(Institute of Electrical and Electronics Engineers), L. Hermans(IMEC), Kris Baert(Ghent University)
Sensors and Materials
January 1, 1999
Cited by 2
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