Integration of tall triple-gate devices with inserted-Ta/sub x/N/sub y/ gate in a 0.274μm/sup 2/ 6t-sram cell and advanced CMOS logic circuitsLiesbeth Witters, S. Biesemans, S. Demuynck et al.|Unknown|2005Cited by 12
Integration of tall triple-gate devices with inserted TaxNy gate in a 0.274µm2 6T-SRAM cell and advanced CMOS logic circuitsLiesbeth Witters, S. Biesemans, Nadine Collaert et al.|Unknown|2005Cited by 4